Documentation
Stepper Specifications
The following documents contain operational and facilities specifications for the designated model stepper. These specifications were derived from the maintenance manual for each model. Please check with the OEM for the most current published specifications.-
Model 990 - 1000 Widefield - Model 1100 Widefield
- Model 4035 Bigfield
- Model 1500 Bigfield
- Model 1600 DSA Bigfield
- Model 1700 Bigfield
- Model 2244i SuperBigfield
- Model 4700 SuperBigfield
Reticle Documents
The following documents are for reticles manufactured by Stepper Equipment Inc.- SDTR1.0A SEI Diagnostic Test Reticle, 3 field
- VTLSR Visual Test Light Scattering Reticle
- VTGR Visual Test Gamma Reticle
- VBSTR Visual Blindstep Reticle
Product Documents
The following documents are OEM manuals for products sold by Stepper Equipment.- Excel Model 1001-C Laser Transducer
- Excel Model 1001-F Laser Transducer
- Excel Binary Interface 1037A jumper settings
- Excel Fast Pulse 1036A jumper settings
- HP362 Common Keyboard Commands
- HPID Universal Module Setup
- Model 5560 Step Motor driver for MVS
- Model 7080 Step Motor driver for MVS
- JWS 300-600 Power Supplies
- Capacitive Sensor Upgrade Installation
Site Navigation
Wafer Steppers
Field Services
Parts Central
ContactInland and Magtech
Servo Motors
Refurbishment includes:
- New Brush Assembly
- New Upper/Lower Bearings
- New Capstan
- New Idler and Idler Bearing
- Verified on Model 1500 Testbed
- 1 Year "No Hassel" Warranty
- Exchange Program reduces cost
Stage Signature Absolute Position Plates
